The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 12, 2016

Filed:

Mar. 26, 2014
Applicants:

Stmicroelectronics S.r.l., Agrate Brianza, IT;

Stmicroelectronics (Crolles 2) Sas, Crolles, FR;

Inventors:

Michele Vaiana, Paterno′, IT;

Daniele Casella, Francofonte, IT;

Giuseppe Bruno, Paterno′, IT;

Rosario Cariola, Giarre, IT;

Benoit Gautheron, Grenoble, FR;

Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/02 (2006.01); G01N 27/12 (2006.01); G01N 27/22 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
G01N 27/225 (2013.01); H01L 28/40 (2013.01);
Abstract

An integrated capacitive-type humidity sensor formed in a semiconductor chip integrating a sensing capacitor and a reference capacitor. Each of the sensing and reference capacitors have at least a first electrode and at least a second electrode, the first and second electrodes of each of the sensing and reference capacitors being arranged at distance and mutually insulated. A hygroscopic layer extends on the sensing and reference capacitors and a conductive shielding region extends on the reference capacitor but not on the sensing capacitor.


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