The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 12, 2016

Filed:

Nov. 14, 2011
Applicants:

Masahiro Takahata, Ibaraki, JP;

Takeshi Gohara, Ibaraki, JP;

Inventors:

Masahiro Takahata, Ibaraki, JP;

Takeshi Gohara, Ibaraki, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 21/36 (2006.01); C22B 9/02 (2006.01); C22B 5/04 (2006.01); C22B 9/22 (2006.01); C22B 59/00 (2006.01); C22C 28/00 (2006.01); C23C 14/16 (2006.01); C23C 14/34 (2006.01); C22B 9/05 (2006.01); C23C 14/14 (2006.01); H01L 29/51 (2006.01);
U.S. Cl.
CPC ...
C22B 9/02 (2013.01); C22B 5/04 (2013.01); C22B 9/05 (2013.01); C22B 9/221 (2013.01); C22B 59/00 (2013.01); C22C 28/00 (2013.01); C23C 14/14 (2013.01); C23C 14/165 (2013.01); C23C 14/3414 (2013.01); H01L 29/517 (2013.01);
Abstract

A method for producing high-purity lanthanum having a purity of 4N or more excluding rare earth elements other than lanthanum and gas components, wherein lanthanum having a purity of 4N or more is produced by reducing, with distilled calcium, a lanthanum fluoride starting material that has a purity of 4N or more excluding rare earth elements other than lanthanum and gas components, and the obtained lanthanum is subjected to electron beam melting to remove volatile substances. The method for producing high-purity lanthanum, in which Al, Fe, and Cu are respectively contained in the amount of 10 wtppm or less. The method for producing high-purity lanthanum, in which total content of gas components is 1000 wtppm or less. The present invention aims to provide a technique capable of efficiently and stably providing high-purity lanthanum, a sputtering target composed of high-purity lanthanum, and a thin film for metal gate that contains high-purity lanthanum as a main component.


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