The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 12, 2016

Filed:

Dec. 27, 2013
Applicant:

Korea Advanced Institute of Science and Technology, Daejeon, KR;

Inventors:

SeokWoo Jeon, Daejeon, KR;

JinWook Baek, Daejeon, KR;

JinSup Lee, Daejeon, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 31/04 (2006.01); C23C 14/14 (2006.01); C23C 16/06 (2006.01); H01B 1/04 (2006.01); C23F 1/14 (2006.01); C23C 14/20 (2006.01); C23F 1/16 (2006.01);
U.S. Cl.
CPC ...
C01B 31/0446 (2013.01); C23C 14/205 (2013.01); H01B 1/04 (2013.01); C23F 1/16 (2013.01);
Abstract

The present invention relates to the method for manufacturing high quality graphene by heating carbon-based self-assembly monolayers, comprising the steps of: forming carbon source layers which are convertible into the graphene layer on the substrate; forming a metal catalyst layer on the carbon source layer; converting the carbon source layers into the graphene layer by heating the first part of the substrate using a local heating source, wherein the carbon source layers and the metal catalyst layers are formed; converting the carbon source layers into graphene by moving the local heating source and then heating the second part which is different from the first part; and removing the metal catalyst layer. The present invention also provides a substrate comprising a graphene layer manufactured by the above method and provides applications in semiconductor devices and electronic materials using the substrate.


Find Patent Forward Citations

Jeon, SeokWoo. (2016). Method for manufacturing high quality graphene by heating carbon-based self-assembly monolayers (U.S. Patent No. 9233851). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9233851

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