The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2016
Filed:
Feb. 27, 2013
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Joseph Johnson, Palo Alto, CA (US);
John Gerling, Livermore, CA (US);
Klaus Schuegraf, San Jose, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
A21B 1/00 (2006.01); H05B 3/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H05B 3/0038 (2013.01); H01L 21/67115 (2013.01);
Abstract
Apparatus for providing pulsed or continuous energy in a process chamber are provided herein. The apparatus may include a lamphead including a set of lamps, wherein the first set of lamps are not solid state light sources, and a set of solid state light sources disposed on the lamp head, to provide pulsed or continuous energy to the process chamber.