The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 05, 2016

Filed:

Apr. 30, 2014
Applicant:

Futurewei Technologies, Inc., Plano, TX (US);

Inventors:

Hongmin Chen, Davis, CA (US);

Xuejin Yan, Santa Clara, CA (US);

Rongsheng Miao, San Jose, CA (US);

Xiao Shen, San Bruno, CA (US);

Zongrong Liu, Pleasanton, CA (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01S 3/042 (2006.01); H01L 21/311 (2006.01); H01S 5/026 (2006.01); H01S 5/042 (2006.01); H01S 5/06 (2006.01); H01S 5/0625 (2006.01); H01S 5/125 (2006.01); H01S 5/50 (2006.01); G02B 6/12 (2006.01);
U.S. Cl.
CPC ...
H01S 3/042 (2013.01); H01L 21/311 (2013.01); H01S 5/0261 (2013.01); H01S 5/0425 (2013.01); H01S 5/0612 (2013.01); G02B 2006/12176 (2013.01); H01S 5/06256 (2013.01); H01S 5/125 (2013.01); H01S 5/5045 (2013.01);
Abstract

A monolithically integrated thermal tunable laser comprising a layered substrate comprising an upper surface and a lower surface, and a thermal tuning assembly comprising a heating element positioned on the upper surface, a waveguide layer positioned between the upper surface and the lower surface, and a thermal insulation layer positioned between the waveguide layer and the lower surface, wherein the thermal insulation layer is at least partially etched out of an Indium Phosphide (InP) sacrificial layer, and wherein the thermal insulation layer is positioned between Indium Gallium Arsenide (InGaAs) etch stop layers.


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