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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9230917 B1

PDFFull Text
Date of Patent:
Jan. 05, 2016

Filed:

May. 29, 2013

Method of processing a carrier with alignment marks

Applicant:

Infineon Technologies Dresden Gmbh, Dresden, DE;

Inventors:

Tarja Hauck, Dresden, DE;

Alessia Sciré, Dresden, DE;

Dieter Kaiser, Dresden, DE;

Andreas Greiner, Grosserkmannsdorf, DE;

Morgana Nicolo, Dresden, DE;

Carolin Wetzig, Radeburg, DE;

Dietrich Burmeister, Dresden, DE;

Assignee:

INFINEON TECHNOLOGIES DRESDEN GMBH, Dresden, DE;

Attorney:
Primary Examiner:

Howard Weiss

Int. Cl.
CPC ...
H01L 21/301 (2006.01); H01L 21/46 (2006.01); H01L 21/78 (2006.01); H01L 23/544 (2006.01);
U.S. Cl.
CPC ...
H01L 23/544 (2013.01); H01L 2223/5442 (2013.01); H01L 2223/5446 (2013.01); H01L 2223/54426 (2013.01); H01L 2223/54453 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A method for processing a carrier may include forming at least one recess structure at least one of over and in the carrier; and annealing the at least one recess structure such that at least one hollow chamber is formed by material of the at least one recess structure, wherein the at least one hollow chamber may form an optical alignment structure.

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Hauck, Tarja. (2016). Method of processing a carrier with alignment marks (U.S. Patent No. 9230917). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9230917

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