The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 05, 2016

Filed:

Jan. 08, 2014
Applicant:

Analog Devices, Inc., Norwood, MA (US);

Inventors:

Denis Ellis, Limerick, IE;

Padraig Fitzgerald, Mallow, IE;

Jo-ey Wong, Wayland, MA (US);

Raymond Goggin, Watergrasshill, IE;

Richard Tarik Eckl, Munich, DE;

Assignee:

ANALOG DEVICES, INC., Norwood, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01H 51/22 (2006.01); H01H 11/00 (2006.01); H01H 59/00 (2006.01); H01H 1/00 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
H01H 11/00 (2013.01); B81B 3/0081 (2013.01); H01H 1/0036 (2013.01); H01H 59/0009 (2013.01); B81B 2201/014 (2013.01); Y10T 29/49002 (2015.01); Y10T 29/49105 (2015.01);
Abstract

Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.


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