The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9229052 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 05, 2016

Filed:

Jul. 18, 2013
Applicant:

Kabushiki Kaisha Toshiba, Minato-Ku, Tokyo, JP;

Inventor:

Mitsuyoshi Endo, Yamato, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/3187 (2006.01); G01R 31/307 (2006.01); H01L 21/66 (2006.01); G01R 31/04 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01R 31/307 (2013.01); H01L 22/34 (2013.01); G01R 31/048 (2013.01); G01R 31/2856 (2013.01); H01L 2224/13 (2013.01); H01L 2224/16 (2013.01); H01L 2924/1305 (2013.01);
Abstract

According to one embodiment, a stack includes first and second wiring structures and an inspection circuit. The inspection circuit includes a switching circuit having an input terminal, a drive terminal, and an output terminal electrically connected with a discharge mechanism. The inspection circuit is configured such that, in a state where a first electric connection is made in the first wiring structure and a second electric connection is made in the second wiring structure, at the time of applying charges to first and second electrodes, the charge applied to the second electrode flows to the drive terminal through the second wiring structure to bring the input terminal and the output terminal of the switching circuit into an electrically conducted state, and the charge applied to the first electrode flows to the discharge mechanism through the first wiring structure and the switching circuit.


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