The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 05, 2016

Filed:

Sep. 09, 2013
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Kenji Yamazoe, Berkeley, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H04N 1/04 (2006.01); G02B 13/16 (2006.01); G01M 11/02 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G01M 11/0257 (2013.01); G03F 7/706 (2013.01);
Abstract

An aberration estimating method using a steepest descent method is configured to estimate, as an aberration of a test optical system, an aberration when a predetermined evaluation function becomes less than or equal to a permissible value. The aberration estimating method comprising the step of updating the aberration with a sum of a current aberration and a first derivative of the evaluation function by the aberration when the evaluation function is larger than the permissible value. The aberration is an aberration of an entire pupil plane of the test optical system. The updating step includes calculating the first derivative by Fourier-transforming the difference instead of an integration at coordinates of respective points on an image plane of the test optical system.


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