The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 05, 2016

Filed:

Sep. 16, 2014
Applicant:

Industrial Technology Research Institute, Hsinchu, TW;

Inventors:

Chung-Yuan Su, Taichung, TW;

Chin-Fu Kuo, Tainan, TW;

Chih-Yuan Chen, Taipei, TW;

Chao-Ta Huang, Hsinchu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 43/06 (2006.01); B81B 7/00 (2006.01); G01P 15/00 (2006.01); G01R 33/00 (2006.01); G01R 33/028 (2006.01);
U.S. Cl.
CPC ...
B81B 7/008 (2013.01); G01P 15/00 (2013.01); G01R 33/00 (2013.01); G01R 33/0286 (2013.01); B81B 2201/025 (2013.01); B81B 2201/0228 (2013.01); B81B 2203/0109 (2013.01);
Abstract

A micro-electro mechanical apparatus having a PN-junction is provided. The micro-electro mechanical apparatus includes a movable mass, a conductive layer, and an electrode. The movable mass includes a P-type semiconductor layer and an N-type semiconductor layer. The PN-junction is formed between the P-type semiconductor layer and the N-type semiconductor layer. The micro-electro mechanical apparatus is capable of eliminating abnormal voltage signal when an alternating current passes through the conductive layer. The micro-electro mechanical apparatus is adapted to measure acceleration and magnetic field. The micro-electro mechanical apparatus can be other types of micro-electro mechanical apparatus such as micro-electro mechanical scanning micro-mirror.


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