The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2015
Filed:
Aug. 29, 2012
Applicants:
Siegfried Krassnitzer, Feldkirch, AT;
Daniel Lendi, Grabs, CH;
Juerg Hagmann, Sax, CH;
Inventors:
Assignee:
OERLIKON SURFACE SOLUTIONS AG, TRUBBACH, Trubbach, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 61/00 (2006.01); H05H 1/24 (2006.01); H01J 27/02 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H05H 1/24 (2013.01); H01J 27/022 (2013.01); H01J 37/32045 (2013.01); H01J 37/32064 (2013.01);
Abstract
The present invention relates to a plasma source which is arranged in floating fashion on a vacuum chamber, wherein the plasma source comprises a source housing, and a filament is provided in the source housing and is arranged so as to be insulated therefrom, wherein means for measuring the potential drop between the source housing and the filament are provided. The measured potential drop can be used for regulating the voltage heating the filament. According to the invention, corresponding means are provided.