The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 29, 2015

Filed:

Oct. 17, 2012
Applicant:

Nitto Denko Corporation, Ibaraki, Osaka, JP;

Inventors:

Ryohei Kakiuchi, Ibaraki, JP;

Satoru Yamamoto, Ibaraki, JP;

Kanako Hida, Ibaraki, JP;

Assignee:

NITTO DENKO CORPORATION, Ibaraki-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/56 (2006.01); H01L 51/00 (2006.01); C23C 14/12 (2006.01); C23C 14/56 (2006.01); H05B 33/10 (2006.01); B65H 23/32 (2006.01);
U.S. Cl.
CPC ...
H01L 51/001 (2013.01); C23C 14/12 (2013.01); C23C 14/562 (2013.01); H01L 51/56 (2013.01); H05B 33/10 (2013.01); B65H 23/32 (2013.01); B65H 2301/5114 (2013.01); B65H 2301/51145 (2013.01);
Abstract

Provided are a method and an apparatus for manufacturing an organic EL device, which makes it possible to manufacture organic EL devices capable of suppressing quality degradation. The method for manufacturing an organic EL device, in which constituent layers of an organic EL element are formed by deposition over a substrate in the form of a strip, while the substrate is being moved in the longitudinal direction, includes a constituent layer-forming step of performing deposition over one surface of the substrate, while the substrate is being moved in the longitudinal direction, sequentially in first and second deposition units arranged along the moving direction of the substrate by discharging a vaporized material from an evaporation source. The constituent layer-forming step includes a plurality of upward deposition steps and a direction changing step.


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