The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2015
Filed:
Jan. 22, 2014
Applicant:
Sensirion Ag, Stafa, CH;
Inventors:
Assignee:
Sensirion AG, Stafa, CH;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/04 (2006.01); G01N 27/14 (2006.01); H01L 21/84 (2006.01); G01F 1/684 (2006.01); G01N 27/12 (2006.01);
U.S. Cl.
CPC ...
H01L 21/84 (2013.01); G01F 1/6845 (2013.01); G01N 27/04 (2013.01); G01N 27/128 (2013.01); G01N 27/14 (2013.01);
Abstract
A sensing device has a semiconductor substrate with an opening and a membrane spanning the opening. A heater is arranged on the membrane. To reduce the thermal conductivity of the membrane, a recess is etched into the membrane from below.