The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 29, 2015

Filed:

Mar. 12, 2013
Applicants:

In-kyo Kim, Yongin, KR;

Myung-soo Huh, Yongin, KR;

Suk-won Jung, Yongin, KR;

Cheol-min Jang, Yongin, KR;

Jae-hyun Kim, Yongin, KR;

Jin-kwang Kim, Yongin, KR;

Chang-woo Shim, Yongin, KR;

Sung-hun Key, Yongin, KR;

Inventors:

In-Kyo Kim, Yongin, KR;

Myung-Soo Huh, Yongin, KR;

Suk-Won Jung, Yongin, KR;

Cheol-Min Jang, Yongin, KR;

Jae-Hyun Kim, Yongin, KR;

Jin-Kwang Kim, Yongin, KR;

Chang-Woo Shim, Yongin, KR;

Sung-Hun Key, Yongin, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Yongin, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/54 (2006.01); H01L 21/30 (2006.01); H01L 51/52 (2006.01); C23C 16/455 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
H01L 21/30 (2013.01); C23C 16/45538 (2013.01); C23C 16/45551 (2013.01); C23C 16/45578 (2013.01); C23C 16/545 (2013.01); H01L 51/52 (2013.01); H01L 51/56 (2013.01);
Abstract

A vapor deposition apparatus for depositing a thin film on a substrate includes a cover having an accommodation portion and a communicated portion, which communicated portion is connected to the accommodation portion and faces a direction of the substrate, and includes a body in the accommodation portion, which body includes a first portion and a second portion. The first portion is disposed at a first location of the body and connected to a first injection portion for injecting a first material onto the substrate, the second portion is disposed at a second location of the body and connected to a second injection portion for injecting a second material onto the substrate, and the body rotates in at least one direction so that the first portion and the second portion are alternately connected to each other with respect to the communicated portion.


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