The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2015
Filed:
Jul. 07, 2014
Seiko Epson Corporation, Tokyo, JP;
Takahisa Akiba, Tsuruoka, JP;
SEIKO EPSON CORPORATION, Tokyo, JP;
Abstract
A method for manufacturing a semiconductor device includes: forming a first insulation film on a portion of a first region of a semiconductor substrate and forming a second insulation film between a second region and a third region of the semiconductor substrate; etching an upper portion of the first insulation film such that the thickness of the first insulation film is less than the thickness of the second insulation film; forming a third insulation film in the second region and forming a fourth insulation film in the third region; and forming a first gate electrode on the first insulation film whose upper portion was etched, forming a second gate electrode on the third insulation film, and forming a third gate electrode on the fourth insulation film.