The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2015
Filed:
Mar. 11, 2014
Canon Kabushiki Kaisha, Tokyo, JP;
Kimiaki Yamaguchi, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An X-ray Talbot interferometer includes a first grating configured to diffract X-rays from an X-ray source and form an interference pattern, a second grating configured to block a portion of X-rays that form the interference pattern, and a detector configured to detect X-rays from the second grating. An inspection object is disposed between the X-ray source and the second grating. The second grating includes a first shield grating portion in which a shield portion and a transmissive portion are arranged periodically at a first period and a second shield grating portion. The first period is expressed as ps×n×Ls/(Ls+Lf), where ps denotes a size of pixels that the detector has, n denotes a positive integer, Ls denotes a distance from the X-ray source to the first shield grating portion, and Lf denotes a distance from the first shield grating portion to the detector.