The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2015
Filed:
May. 28, 2011
Rolf Bazlen, Rorschach, CH;
Rolf Bazlen, Rorschach, CH;
EVATEC ADVANCED TECHNOLOGIES AG, Balzers, LI;
Abstract
An exhaust opening of a process chamber () contained in a vacuum chamber () is connected to an exhaust line () by a connector comprising a bellows () with one end which is connected to the exhaust line () fixed to a housing and its opposite end carrying a coupling tube () for connecting to a coupling ring () which surrounds the exhaust opening, the coupling tube () being elastically biased towards the same. The coupling tube () can be moved between a connected state where it is in contact with the coupling ring () and a disconnected state by an actuator reciprocatable in an axial direction perpendicular to the exhaust opening. To enable a gas-tight connection with the process chamber () the coupling tube () has lateral play such that it can align with the coupling ring () when a conical surface of the coupling tube () contacts a complementary conical surface on the coupling ring () in the connected state. The actuator comprises two rods () which extend through drill holes of an outward extending holding ring () of the coupling tube () and interact with the same in such a way that the lateral position of the coupling tube () is fixed in the disconnected state.