The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 29, 2015

Filed:

May. 18, 2009
Applicants:

Pooran Chandra Joshi, Vancouver, WA (US);

Apostolos T. Voutsas, Portland, OR (US);

Inventors:

Pooran Chandra Joshi, Vancouver, WA (US);

Apostolos T. Voutsas, Portland, OR (US);

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); C23C 16/30 (2006.01); C23C 16/509 (2006.01); C23C 16/56 (2006.01); H01L 21/02 (2006.01); H01L 21/316 (2006.01); H01L 33/42 (2010.01);
U.S. Cl.
CPC ...
C23C 16/30 (2013.01); C23C 16/5096 (2013.01); C23C 16/56 (2013.01); H01L 21/0234 (2013.01); H01L 21/02126 (2013.01); H01L 21/02274 (2013.01); H01L 21/02321 (2013.01); H01L 21/02337 (2013.01); H01L 21/31608 (2013.01); H01L 21/0262 (2013.01); H01L 21/02532 (2013.01); H01L 21/02601 (2013.01); H01L 33/42 (2013.01);
Abstract

A solar call is provided along with a method for forming a semiconductor nanocrystalline silicon insulating thin-film with a tunable bandgap. The method provides a substrate and introduces a silicon (Si) source gas with at least one of the following source gases: germanium (Ge), oxygen, nitrogen, or carbon into a high density (HD) plasma-enhanced chemical vapor deposition (PECVD) process. A SiOxNyCz thin-film embedded with a nanocrystalline semiconductor material is deposited overlying the substrate, where x, y, z≧0, and the semiconductor material is Si, Ge, or a combination of Si and Ge. As a result, a bandgap is formed in the SiOxNyCz thin-film, in the range of about 1.9 to 3.0 electron volts (eV). Typically, the semiconductor nanoparticles have a size in a range of 1 to 20 nm.


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