The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 29, 2015

Filed:

Apr. 23, 2014
Applicant:

Jx Nippon Oil & Energy Corporation, Tokyo, JP;

Inventors:

Madoka Takahashi, Tokyo, JP;

Yoshihiro Kumagai, Yokohama, JP;

Suzushi Nishimura, Yokohama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/52 (2006.01); B29C 59/02 (2006.01); B29C 59/04 (2006.01); H01L 51/00 (2006.01); H01L 51/56 (2006.01); B29C 35/02 (2006.01); B29C 35/04 (2006.01); B29C 35/08 (2006.01);
U.S. Cl.
CPC ...
B29C 59/022 (2013.01); B29C 59/026 (2013.01); B29C 59/046 (2013.01); H01L 51/0014 (2013.01); H01L 51/5262 (2013.01); H01L 51/5275 (2013.01); H01L 51/56 (2013.01); B29C 35/02 (2013.01); B29C 2035/046 (2013.01); B29C 2035/0822 (2013.01);
Abstract

A method for producing a substrate having a concavity and convexity pattern includes: a step for applying a sol containing a silica precursor on a substrate to form a coating film; a step for drying the coating film; a pressing step for pressing a mold having a concavity and convexity pattern against the dried coating film with a pressing roll; a step for peeling off the mold from the coating film; and a step for baking the coating film to which the concavity and convexity pattern has been transferred. The coating film is dried in the drying step so that the ratio of weight of the coating film to dried weight of the coating film is in a range of 1.4 to 8.8, the dried weight being obtained by baking the coating film at a temperature of 100 degrees Celsius. The coating film may be heated in the pressing step.


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