The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2015
Filed:
Aug. 28, 2012
Makiko Sugiura, Hekinan, JP;
Hirofumi Higuchi, Okazaki, JP;
Makiko Sugiura, Hekinan, JP;
Hirofumi Higuchi, Okazaki, JP;
DENSO CORPORATION, Kariya, JP;
Abstract
A complex device includes: a substrate having a thick portion, a cavity and a membrane for bridging the cavity; and multiple piezoelectric elements having a lower electrode, a piezoelectric film and an upper electrode. A part of the piezoelectric elements has a projecting portion arranged on the upper electrode. The part of piezoelectric elements () provides a vertical pressure detection element. The piezoelectric elements further have an ultrasonic element other than the vertical pressure detection element. The ultrasonic element is arranged over at least the cavity of the substrate in a horizontal direction.