The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 22, 2015

Filed:

Sep. 30, 2013
Applicant:

Ngk Insulators, Ltd., Nagoya-Shi, JP;

Inventors:

Takashi Ebigase, Nagoya, JP;

Tomohiko Hibino, Nagoya, JP;

Assignee:

NGK Insulators, Ltd., Nagoya-Shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); C04B 35/491 (2006.01); H01L 41/39 (2013.01); H01L 41/43 (2013.01); C04B 35/493 (2006.01); C04B 35/64 (2006.01); C04B 35/486 (2006.01);
U.S. Cl.
CPC ...
H01L 41/39 (2013.01); C04B 35/486 (2013.01); C04B 35/491 (2013.01); C04B 35/493 (2013.01); C04B 35/64 (2013.01); H01L 41/1876 (2013.01); H01L 41/43 (2013.01); C04B 2235/3213 (2013.01); C04B 2235/3251 (2013.01); C04B 2235/3255 (2013.01); C04B 2235/72 (2013.01); C04B 2235/725 (2013.01); C04B 2235/728 (2013.01); C04B 2235/761 (2013.01); C04B 2235/765 (2013.01); C04B 2235/94 (2013.01); C04B 2235/9623 (2013.01); C04B 2235/9638 (2013.01); Y10T 29/42 (2015.01);
Abstract

The method for manufacturing a piezoelectric substrate includes a process of forming a material having composition M(NNb)O(where 0≦y≦0.045, M represents PbSrwith 0≦p≦0.03, and N represents TiZrwith 0.45≦q≦0.60) into a sheet form, and a process of burning the material formed into the sheet form while mounted on a setter to obtain a piezoelectric substrate. A thickness of the piezoelectric substrate is 30 μm or less, and a surface area/thickness ratio of the piezoelectric substrate is 1×10μm or more. The variable x has a value within or on a boundary of a region R shown by hatching in FIG.


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