The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 22, 2015

Filed:

Mar. 28, 2013
Applicants:

Denso Corporation, Kariya, Aichi-pref., JP;

Kyoto University, Kyoto-shi, Kyoto-fu., JP;

Inventors:

Tomoya Jomori, Kariya, JP;

Toshiyuki Tsuchiya, Kyoto, JP;

Assignees:

DENSO CORPORATION, Kariya, JP;

Kyoto University, Kyoto-shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01); H01L 29/84 (2006.01); G01C 19/5747 (2012.01);
U.S. Cl.
CPC ...
H01L 29/84 (2013.01); G01C 19/5747 (2013.01);
Abstract

An angular velocity sensor for detecting an angular velocity includes a substrate having the stationary portion, two pair of driver weights, two detector weights, and a detector electrode. The angular velocity is detected by using a differential signal output indicating a variation in capacitances. When the absolute value of a de-coupling ratio (=(fanti−fin)/fanti) is greater than or equal to 0.07, the occurrence of the anti-phase mode movement can be prevented so as to prevent the occurrence of the output error of the gyro sensor and detect the angular velocity more precisely.


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