The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9219097 B1

PDF
Full Text
Expired
Date of Patent:
Dec. 22, 2015

Filed:

Dec. 31, 2013
Applicant:

Sony Corporation, Tokyo, JP;

Inventors:

Sanghoon Ha, Kanagawa, JP;

Hiroaki Ishiwata, Tokyo, JP;

Assignee:

SONY CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/062 (2012.01); H01L 27/148 (2006.01); H01L 27/146 (2006.01); H01L 31/18 (2006.01); H01L 31/0352 (2006.01); H01L 31/103 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14806 (2013.01); H01L 27/14616 (2013.01); H01L 27/14689 (2013.01); H01L 31/03529 (2013.01); H01L 31/103 (2013.01); H01L 31/18 (2013.01); H01L 27/14643 (2013.01); Y02E 10/50 (2013.01);
Abstract

A method for producing a solid-state imaging element which has photoconversion pixels, the method including forming an impurity region of the first conduction type and a second impurity region of the second conduction type on the impurity region of the first conduction type by ion implantation by using the same mask; forming on the surface of the semiconductor substrate a transfer gate constituting the charge transfer section which extends over the second impurity region of the second conduction type; forming a charge accumulating region of the first conduction type constituting the sensor section by ion implantation; and forming a first impurity region of the second conduction type, which has a higher impurity concentration than the second impurity region of the second conduction type, by ion implantation.


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