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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9218994 B1

PDFFull Text
Expired
Date of Patent:
Dec. 22, 2015

Filed:

Feb. 29, 2008

Two-dimensional transfer station used as interface between a process tool and a transport system and a method of operating the same

Applicants:

Olaf Zimmerhackl, Lohmen, DE;

Alfred Honold, Bad Abbach, DE;

Inventors:

Olaf Zimmerhackl, Lohmen, DE;

Alfred Honold, Bad Abbach, DE;

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorney:

Amerson Law Firm, PLLC

Primary Examiner:

Saul Rodriguez

Assistant Examiner:

Willie Berry, Jr

Int. Cl.
CPC ...
B65H 1/00 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67276 (2013.01); H01L 21/6773 (2013.01); H01L 21/67715 (2013.01); H01L 21/67769 (2013.01); H01L 21/67775 (2013.01);
Abstract

By providing a space-efficient transfer buffer system in a manufacturing environment, which may act as a local interface between an automated transport system and the load port assembly of a process tool under consideration, the I/O capability of the process tool may be significantly enhanced, while not unduly contributing to the overall width of the process tools. In particular embodiments, an array-like arrangement of respective buffer places is used, wherein each buffer place is accessible by the transport system and may also interact with each of the load ports of the process tool.

Find Patent Forward Citations

Zimmerhackl, Olaf. (2015). Two-dimensional transfer station used as interface between a process tool and a transport system and a method of operating the same (U.S. Patent No. 9218994). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9218994

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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