The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2015
Filed:
Dec. 12, 2011
Applicants:
Fred Chetcuti, Millbrae, CA (US);
Edward J. Mcinerney, San Jose, CA (US);
Inventors:
Fred Chetcuti, Millbrae, CA (US);
Edward J. McInerney, San Jose, CA (US);
Assignee:
APOLLO PRECISION BEIJING LIMITED, Beijing, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); H01J 37/34 (2006.01); C23C 14/35 (2006.01); C23C 14/56 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3405 (2013.01); C23C 14/35 (2013.01); C23C 14/568 (2013.01); H01J 37/345 (2013.01);
Abstract
A magnetron include a center plurality of magnets and an outer plurality of magnets arranged around the center plurality of magnets in a shape of two long sections and two shorter turnaround sections. The outer plurality of magnets are configured with at least one region of weaker magnetic field strength in at least one of the two long sections and adjacent to one of the two turnaround sections.