The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 22, 2015

Filed:

Apr. 15, 2010
Applicants:

Jun Hyuk Moon, Seoul, KR;

Woo Min Jin, Busan, KR;

Juhwan Shin, Seoul, KR;

Inventors:

Jun Hyuk Moon, Seoul, KR;

Woo Min Jin, Busan, KR;

Juhwan Shin, Seoul, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03H 1/02 (2006.01); G03F 7/20 (2006.01); G03F 7/40 (2006.01); G03H 1/04 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70408 (2013.01); G03F 7/405 (2013.01); G03F 7/70383 (2013.01); G03H 2001/0441 (2013.01); Y10T 428/249967 (2015.04);
Abstract

Provided are a method for fabricating a porous carbon structure using optical interference lithography, and a porous carbon structure fabricated by same, wherein the method for fabricating a porous carbon structure using optical light interference lithography includes: forming a photoresist layer on a substrate; irradiating a three-dimensional optical interference pattern onto the photoresist formed using three-dimensional optical interference lithography to form a three-dimensional porous photoresist pattern; coating the formed three-dimensional porous photoresist pattern with an inorganic material; heating the photoresist pattern on which the inorganic material is coated to carbonize the pattern; and removing the coated inorganic material.


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