The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2015
Filed:
Nov. 02, 2009
Applicants:
Bong-kee Lee, Ulsan, KR;
Dong Sung Kim, Pohang, KR;
Tai-hun Kwon, Pohang-si, KR;
Young OK Lee, Pohang-si, KR;
Inventors:
Assignee:
POSTECH ACADEMY-INDUSTRY FOUNDATION, Pohang, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); B81C 99/00 (2010.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/2039 (2013.01); B81C 99/009 (2013.01); G03F 7/00 (2013.01);
Abstract
Provided is a method for fabricating a microstructure. The method includes disposing an X-ray mask on photosensitive material and exposing the photosensitive material by radiating X-rays to the photosensitive material, etching the exposed photosensitive material, forming a mold having a micro-pattern by filing the etched photosensitive material with metal, forming a mold module by combining a plurality of molds, and forming a microstructure using the mold module.