The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2015
Filed:
Feb. 19, 2014
Applicant:
Nikon Corporation, Chiyoda-ku, JP;
Inventors:
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01); G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0833 (2013.01); G02B 26/08 (2013.01); Y10T 29/49885 (2015.01);
Abstract
Provided is a spatial light modulation element comprising a substrate; a flat portion that is movable relative to the substrate; a flat board attached to the flat portion; and a dielectric film that is formed on a surface of the flat board opposite the surface on which the flat portion is attached, and reflects incident light. In the spatial light modulation element the dielectric film may include two or more types of dielectric layers that are repeatedly layered in an alternating manner, such that adjacent layers have different refractive indexes from each other. Furthermore, the dielectric film may be formed by alternately layering an AlOfilm and a SiOfilm.