The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 22, 2015

Filed:

Mar. 15, 2013
Applicant:

The Regents of the University of California, Oakland, CA (US);

Inventors:

Brenton R. Simon, Irvine, CA (US);

Alexander A. Trusov, Irvine, CA (US);

Andrei M. Shkel, Irvine, CA (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/56 (2012.01); G01C 19/5621 (2012.01); G01P 15/097 (2006.01); H03H 9/24 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
G01P 15/097 (2013.01); G01C 19/5621 (2013.01); H03H 9/2463 (2013.01); H03H 9/2468 (2013.01); H03H 2009/02496 (2013.01);
Abstract

A MEMS resonator includes two resonating masses having an anti-phase and in-phase resonance mode, each mode having a resonance frequency, and an anti-phase resonance levering system coupled to the two resonating masses to stiffen and/or dampen the in-phase resonance mode while leaving the anti-phase resonance mode compliant. This effectively raises the in-phase resonance frequency above the anti-phase resonance frequency, and potentially creates a large frequency separation between the two resonance modes. This reduces the energy transfer between the two modes, allowing for robustness to external acceleration, because the in-phase mode is of a higher frequency. The anti-phase resonance levering system is disposed between the two resonating masses as an internal levering mechanism, or is disposed around the two resonating masses as an external levering mechanism.


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