The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 22, 2015

Filed:

Aug. 24, 2012
Applicants:

Junji Ando, Anjo, JP;

Tomoo Suzuki, Aichi, JP;

Tomoki Ogawa, Kariya, JP;

Akinori Iwai, Kariya, JP;

Nobuyoshi Yoshimura, Okazaki, JP;

Hiroyuki Hashitomi, Anjo, JP;

Inventors:

Junji Ando, Anjo, JP;

Tomoo Suzuki, Aichi, JP;

Tomoki Ogawa, Kariya, JP;

Akinori Iwai, Kariya, JP;

Nobuyoshi Yoshimura, Okazaki, JP;

Hiroyuki Hashitomi, Anjo, JP;

Assignees:

JTEKT Corporation, Osaka-shi, JP;

CNK Co., Ltd., Kariya-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/24 (2006.01); C23C 14/06 (2006.01); C23C 16/26 (2006.01); C23C 16/458 (2006.01); C23C 16/50 (2006.01); F16D 3/06 (2006.01); F16C 3/03 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 14/0611 (2013.01); C23C 16/26 (2013.01); C23C 16/458 (2013.01); C23C 16/50 (2013.01); F16C 3/03 (2013.01); F16D 3/06 (2013.01); H01J 37/32669 (2013.01); F16C 2206/04 (2013.01); F16C 2326/06 (2013.01); F16D 2250/0046 (2013.01); F16D 2300/10 (2013.01);
Abstract

Plural spline shafts are arranged around columnar plasma, and plural spline shafts are coaxially aligned in a direction that the columnar plasma extends within a vacuum chamber. The plural coaxially aligned spline shafts are positioned so that axial gap is formed between the respective male spline sections. The axial gap of the plural male spline sections is positioned at a center of the columnar plasma in the direction that the columnar plasma extends.


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