The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 22, 2015

Filed:

Apr. 15, 2013
Applicant:

General Electric Company, Schenectady, NY (US);

Inventors:

Mehmet Arik, Uskudar Istanbul, TR;

Stanton Earl Weaver, Northville, NY (US);

Assignee:

General Electric Company, Schenectady, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
F04B 45/047 (2006.01); B81B 7/00 (2006.01); H01L 23/467 (2006.01); B81C 1/00 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0093 (2013.01); B81C 1/00158 (2013.01); F04B 45/047 (2013.01); H01L 23/467 (2013.01); B81B 2201/036 (2013.01); B81B 2201/058 (2013.01); B81B 2203/0127 (2013.01); H01L 41/0973 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.


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