The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2015

Filed:

Dec. 16, 2011
Applicants:

Oliver Pursche, Ulm, DE;

Peter Volk, Griesingen, DE;

Inventors:

Oliver Pursche, Ulm, DE;

Peter Volk, Griesingen, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F27D 11/00 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 31/18 (2006.01); H01L 31/0392 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/67754 (2013.01); H01L 31/0392 (2013.01); H01L 31/18 (2013.01); Y02E 10/50 (2013.01);
Abstract

The application describes an apparatus and a method for the thermal treatment of substrates, in particular thin film substrates for photovoltaic applications. The apparatus comprises at least one substrate carrier for supporting a substrate, a heating unit having at least one heating element for heating a substrate located on the substrate carrier and at least one heating element carrier for supporting the at least one heating element. The heating element carrier is designed to allow a local change in distance between the substrate carrier and the heating element, so as to be able to provide locally different heating intensities. In the method such a change in distance is carried out during the thermal treatment.


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