The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2015

Filed:

Jul. 19, 2011
Applicant:

Tomohito Nakano, Kyoto, JP;

Inventor:

Tomohito Nakano, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 49/24 (2006.01); H01J 49/16 (2006.01); H01J 49/26 (2006.01); H01J 49/00 (2006.01);
U.S. Cl.
CPC ...
H01J 49/24 (2013.01); H01J 49/005 (2013.01);
Abstract

A vacuum analyzer including a vacuum reaction chamber; a gas source; a flow rate-restricting resistance tube connected to the reaction chamber; a pressure detection device disposed upstream from the flow rate-restricting resistance tube; a flow rate adjustment for adjusting the amount of gas exiting the flow rate-restricting resistance tube so that the detected value from the pressure detection device reaches a prescribed value; a split flow path that is provided with a splitter resistance tube and divides the gas at a location between the flow rate adjustment and the pressure detection device; a passage open to the atmosphere which divides the gas flowing from upstream at a location between the flow rate adjustment and the pressure detection device and releases the divided gas to the atmosphere; and a valve provided in the passage open to the atmosphere. Therein, the split flow path is connected immediately downstream from the valve.


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