The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2015

Filed:

May. 17, 2012
Applicants:

Timothy J. Brosnihan, Natick, MA (US);

Mark B. Andersson, Northborough, MA (US);

Eugene E. Fike, Iii, Amesbury, MA (US);

Joyce Wu, Somerville, MA (US);

J. Lodewyk Steyn, Winchester, MA (US);

Inventors:

Timothy J. Brosnihan, Natick, MA (US);

Mark B. Andersson, Northborough, MA (US);

Eugene E. Fike, III, Amesbury, MA (US);

Joyce Wu, Somerville, MA (US);

J. Lodewyk Steyn, Winchester, MA (US);

Assignee:

Pixtronix, Inc., San Diego, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01); G02B 26/02 (2006.01); G09G 3/34 (2006.01); H01L 23/544 (2006.01); B81C 1/00 (2006.01); B81B 7/00 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
G02B 26/02 (2013.01); B81B 7/0067 (2013.01); B81C 1/00 (2013.01); B81C 1/00039 (2013.01); B81C 1/00261 (2013.01); G09G 3/3433 (2013.01); H01L 23/544 (2013.01); H01L 24/83 (2013.01); H01L 24/97 (2013.01); B81B 2201/038 (2013.01); B81B 2201/047 (2013.01); B81C 2203/054 (2013.01); G09G 3/3413 (2013.01); G09G 3/3466 (2013.01); G09G 2320/041 (2013.01); G09G 2360/144 (2013.01); H01L 24/11 (2013.01); H01L 24/13 (2013.01); H01L 24/16 (2013.01); H01L 24/32 (2013.01); H01L 24/73 (2013.01); H01L 24/81 (2013.01); H01L 2223/54426 (2013.01); H01L 2224/114 (2013.01); H01L 2224/1132 (2013.01); H01L 2224/11462 (2013.01); H01L 2224/131 (2013.01); H01L 2224/16238 (2013.01); H01L 2224/2612 (2013.01); H01L 2224/29011 (2013.01); H01L 2224/32238 (2013.01); H01L 2224/73201 (2013.01); H01L 2224/81121 (2013.01); H01L 2224/81192 (2013.01); H01L 2224/81815 (2013.01); H01L 2224/83007 (2013.01); H01L 2224/83121 (2013.01); H01L 2924/01029 (2013.01); H01L 2924/12041 (2013.01); H01L 2924/1461 (2013.01); H01L 2924/15788 (2013.01); Y10T 428/24157 (2015.01); Y10T 428/24744 (2015.01);
Abstract

A display apparatus includes a first substrate, a plurality of microelectromechanical systems (MEMS) light modulators formed from a structural material coupled to the first substrate and a second substrate separated from the first substrate. A plurality of spacers extend from the first substrate to keep the second substrate a minimum distance away from the plurality of light modulators. The spacers include a first polymer layer having a surface in contact with the first substrate, a second polymer layer encapsulating the first polymer layer and a layer of the structural material encapsulating the second polymer layer. The spacers can be used as fluid barriers and configured to surround more than one but less than all of the MEMS light modulators in the display apparatus.


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