The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2015
Filed:
Mar. 25, 2014
Hitachi High-tech Science Corporation, Minato-ku, Tokyo, JP;
Yoshiki Matoba, Tokyo, JP;
Hitachi High-Tech Science Corporation, Minato-ku, Tokyo, JP;
Abstract
A foreign matter detector includes an X-ray source which irradiates a sample moving in a constant direction with primary X-rays, a parallel two-dimensional slit which includes a plurality of slits arranged in at least a moving direction of the sample and emits parallel secondary X-rays by extracting a parallel component of secondary X-rays generated from the sample, a dispersing element which disperses the parallel secondary X-rays to obtain a specific X-ray fluorescence, a TDI sensor which receives the X-ray fluorescence, and a control unit which controls the TDI sensor to detect a foreign matter corresponding to the X-ray fluorescence. The control unit integrates a luminance value of the X-ray fluorescence received by the TDI sensor while matching a direction and a speed of charge transfer of the TDI sensor to a direction and a speed of movement of the sample.