The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2015
Filed:
May. 09, 2011
Genki Yoshikawa, Tsukuba, JP;
Heinrich Rohrer, Tsukuba, JP;
Terunobu Akiyama, Neuchatel, CH;
Vettiger Peter, Neuchatel, CH;
Genki Yoshikawa, Tsukuba, JP;
Heinrich Rohrer, Tsukuba, JP;
Terunobu Akiyama, Neuchatel, CH;
Vettiger Peter, Neuchatel, CH;
National Institute for Materials Science, Ibaraki, JP;
Abstract
Deflection of a free end of one plate-like member, that is caused by uniform stress, is transmitted to an other plate-like member by moving a free end of the other plate-like member. According to this configuration, the uniform stress applied to the one plate-like member is converted into stress induced by a point force in the other plate-like member, and then, the induced stress is concentrated on a fixed end side narrow portion in which a piezoresistor is provided. Thus, a novel structure for a piezoresistive surface stress sensor having high sensitivity to uniform stress applied to the surface of the sensor is provided.