The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2015
Filed:
May. 16, 2011
Naoyuki Goto, Takasago, JP;
Homare Nomura, Takasago, JP;
Shigeto Adachi, Takasago, JP;
Koumei Fujioka, Takasago, JP;
Naoyuki Goto, Takasago, JP;
Homare Nomura, Takasago, JP;
Shigeto Adachi, Takasago, JP;
Koumei Fujioka, Takasago, JP;
Kobe Steel, Ltd., Kobe-shi, JP;
Abstract
In an ion bombardment treatment apparatus (A) and a cleaning method, base materials (W) to be treated are held by a work table () so as to be placed between a filament () and an anode () in a vacuum chamber (), and a discharge power supply () which can generate a glow discharge upon the application of a potential difference between the filament () and the anode () is insulated from the vacuum chamber (). In the ion bombardment treatment apparatus (A) and the cleaning method, the efficiency of the cleaning of a base material can be improved and a power supply can be controlled stably.