The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2015
Filed:
Nov. 26, 2013
Applicant:
Nxp B.v., Eindhoven, NL;
Inventors:
Kim Phan Le, Eindhoven, NL;
Jozef Thomas Martinus van Beek, Rosmalen, NL;
Martijn Goossens, Veldhoven, NL;
Assignee:
NXP, B.V., Eindhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03B 5/30 (2006.01); H03B 5/42 (2006.01);
U.S. Cl.
CPC ...
H03B 5/30 (2013.01); H03B 5/42 (2013.01); H03B 2200/0016 (2013.01);
Abstract
The invention provides MEMS oscillator designs in which the thermal actuation and piezoresistive detection signals are separated. A first approach splits the frequency of the loop into two distinct components, an actuation frequency and a detection frequency. A second approach modifies the design of the MEMS resonator such that the actuation signal follows a different path through the MEMS resonator than the detection signal.