The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 08, 2015

Filed:

Mar. 09, 2010
Applicants:

Reid John Chesterfield, Santa Barbara, CA (US);

Justin Butler, San Diego, CA (US);

Paul Anthony Sant, Santa Barbara, CA (US);

Inventors:

Reid John Chesterfield, Santa Barbara, CA (US);

Justin Butler, San Diego, CA (US);

Paul Anthony Sant, Santa Barbara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 5/12 (2006.01); H01L 51/00 (2006.01); F26B 5/04 (2006.01); F26B 21/14 (2006.01); H01L 51/56 (2006.01); H01L 27/32 (2006.01); H01L 51/50 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0003 (2013.01); F26B 5/04 (2013.01); F26B 21/14 (2013.01); H01L 51/0026 (2013.01); H01L 51/0029 (2013.01); H01L 51/56 (2013.01); H01L 27/3211 (2013.01); H01L 27/3295 (2013.01); H01L 51/0052 (2013.01); H01L 51/0059 (2013.01); H01L 51/5012 (2013.01);
Abstract

There is provided a process for vacuum drying. The process includes the steps of: depositing a liquid composition containing a film-forming material and at least one solvent onto a workpiece to form a wet layer; placing the wet layer on the workpiece into a vacuum chamber including a condenser; and treating the wet layer at a controlled temperature in the range of −25 to 80° C. and under an applied vacuum in the range of 10to 1,000 Torr for a period of 1-100 minutes; wherein the condenser is maintained at a temperature at which the solvent will condense as a liquid at the applied vacuum.


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