The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 08, 2015

Filed:

Nov. 13, 2012
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Seiji Osawa, Minowa, JP;

Keiichi Yamaguchi, Ina, JP;

Toshihiko Shiohara, Shiojiri, JP;

Yuichi Isono, Azumino, JP;

Takayuki Kikuchi, Okaya, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 1/20 (2006.01); H01L 41/09 (2006.01); G01F 1/66 (2006.01); G01C 19/5607 (2012.01);
U.S. Cl.
CPC ...
H01L 41/09 (2013.01); G01C 19/5607 (2013.01); G01F 1/662 (2013.01);
Abstract

A vibrator includes: a vibrating reed having a vibrating body, first and second support portions supporting the vibrating body, and four beams coupling the first and second support portions with the vibrating body; electrodes disposed at the vibrating body; and terminals disposed at the first and second support portions and electrically connected with the electrodes via wires disposed at the beams. Between the terminals next to each other, a plurality of grooves spaced apart in a predetermined direction and extending in a direction intersecting the predetermined direction are disposed.


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