The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2015
Filed:
Oct. 18, 2013
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Tsutomu Hiroki, Nirasaki, JP;
Assignee:
TOKYO ELECTRONICS LIMITED, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01); B65G 49/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67745 (2013.01); H01L 21/6719 (2013.01); H01L 21/67196 (2013.01); H01L 21/67201 (2013.01); H01L 21/67766 (2013.01); H01L 21/67778 (2013.01); B65G 49/00 (2013.01);
Abstract
A bypass route is provided in order to transfer a substrate without passing through the atmospheric pressure transfer chamber, that is, a loader module, from a load lock chamber to a storage. In the bypass route, a sub-transfer unit for transferring the processed substrate from the load lock chamber to the storage is provided. The sub-transfer unit transfers the processed substrate from the load lock chamber to the storage, and a main transfer unit of the loader module returns the processed substrate from the storage to a transport container on holding stage.