The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2015
Filed:
Feb. 25, 2014
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Khurshed Sorabji, San Jose, CA (US);
Alexander N. Lerner, San Jose, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/67 (2006.01); C30B 31/14 (2006.01); H01L 21/30 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67098 (2013.01); C30B 31/14 (2013.01); H01L 21/30 (2013.01); H01L 21/67109 (2013.01); H01L 21/67115 (2013.01); H01L 22/10 (2013.01); H01L 2924/0002 (2013.01);
Abstract
In one embodiment, a substrate processing apparatus includes a chamber having an interior volume with an upper portion and a lower portion, a cooling source disposed in the upper portion of the interior volume, a heating source opposing the cooling source, a magnetically movable substrate support that moves between the upper portion and the lower the portion, and a plurality of sensors coupled to the chamber to detect the position of the substrate support relative to the heating source and the cooling source.