The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 08, 2015

Filed:

Jun. 01, 2015
Applicant:

Lockheed Martin Corporation, Bethesda, MD (US);

Inventors:

Krisna Bhargava, San Jose, CA (US);

Mark Goodnough, Santa Ynez, CA (US);

Elna Saito, Santa Barbara, CA (US);

Jeffrey W. Scott, Santa Barbara, CA (US);

James Kreider, Goleta, CA (US);

Assignee:

LOCKHEED MARTIN CORPORATION, Bethesda, MD (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/00 (2006.01); G03F 7/36 (2006.01); C23F 3/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/36 (2013.01); C23F 1/00 (2013.01); C23F 3/00 (2013.01);
Abstract

A method includes etching one or more fluidic channels into a first substrate made of a first material according to a first spatial pattern. The method also includes, after etching the fluidic channels, then separately etching a space in the first substrate according to a different second pattern that includes at least one connection between at least two different portions of the fluidic channels. The method still further includes depositing a different second material into the space. The method yet further includes bonding a different second substrate to the first substrate to enclose the fluidic channels to configure them to contain or pass one or more fluids. For fabricating a Joule-Thomson cooler, the first substrate is made of a first thermally insulating material; the second material is a thermally conducting material; and the second substrate is made of a second thermally insulating material.


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