The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2015
Filed:
Mar. 03, 2015
Applicants:
Yu-fu Kang, Taipei, TW;
Chiung-c. Lo, Miaoli, TW;
Inventors:
Yu-Fu Kang, Taipei, TW;
Chiung-C. Lo, Miaoli, TW;
Assignee:
RICHTEK TECHNOLOGY CORPORATION, Chupei, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0051 (2013.01); B81B 3/0021 (2013.01); B81B 3/0072 (2013.01); B81B 2203/0118 (2013.01);
Abstract
The present invention discloses a MEMS chip which includes a device wafer and a cap wafer. The device wafer includes a first substrate and a MEMS device. The MEMS device includes a movable structure. The cap wafer includes a second substrate, an elastic structure and a stopper. The stopper is connected to the second substrate by the elastic structure. The stopper constrains a movement of the movable structure, and when the movable structure contacts the stopper, the elastic structure provides a resilience force to the stopper.