The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2015
Filed:
Mar. 11, 2014
Applicant:
The Timken Company, North Carolina, OH (US);
Inventors:
Richard J. Fowler, North Canton, OH (US);
Michael D. Drory, Dublin, NH (US);
Assignee:
The Timken Company, North Canton, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); H01R 39/64 (2006.01); C23C 14/50 (2006.01); H01J 37/32 (2006.01); C23C 16/458 (2006.01); C23C 16/50 (2006.01);
U.S. Cl.
CPC ...
H01R 39/643 (2013.01); C23C 14/505 (2013.01); H01J 37/32 (2013.01); H01J 37/32577 (2013.01); H01J 37/32706 (2013.01); H01J 37/32715 (2013.01); C23C 16/4584 (2013.01); C23C 16/4586 (2013.01); C23C 16/50 (2013.01);
Abstract
A coupling () for the introduction of a bias voltage into a vacuum chamber. The coupling consists of a metallic ball bearing assembly (), a bearing sleeve or cup (), and an EMI shielding gasket () seated within the bearing sleeve or cup. The ball bearing assembly is fitted within the EMI shielding gasket, about a metallic shaft () which, in turn, is coupled to a source of the bias voltage. The bearing sleeve or cup is, in turn, coupled to a rotating component such as a platen, for receiving the bias voltage within the vacuum chamber.