The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2015
Filed:
Feb. 28, 2013
Applicant:
Sandia Corporation, Albuquerque, NM (US);
Inventors:
Michael David Henry, Albuquerque, NM (US);
Roy H. Olsson, Albuquerque, NM (US);
Karl Douglas Greth, Albuquerque, NM (US);
Travis Ryan Young, Albuquerque, NM (US);
Janet Nguyen, Albuquerque, NM (US);
James E. Stevens, Albuquerque, NM (US);
Assignee:
Sandia Corporation, Albuquerque, NM (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/00 (2006.01); H01P 11/00 (2006.01); H01P 1/201 (2006.01); H03H 3/007 (2006.01); H03H 9/46 (2006.01);
U.S. Cl.
CPC ...
H01P 11/007 (2013.01); H01P 1/201 (2013.01); H03H 3/0077 (2013.01); H03H 9/462 (2013.01);
Abstract
A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.