The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2015
Filed:
Oct. 20, 2014
Ushio Denki Kabushiki Kaisha, Tokyo-to, JP;
Gota Niimi, Shizuoka-ken, JP;
Dominik Marcel Vaudrevange, Aachen, DE;
Ralf Gordon Conrads, Kempen, DE;
Maghiel Jan Kole, San Jose, CA (US);
Wilhelmus V. J. Van Nunspeet, Simpelveld, NL;
Johannes W. J. L. Cuijpers, Roermond, NL;
Andre Matthias Prinz, Dueren, DE;
USHIO Denki Kabushiki Kaisha, Tokyo-to, JP;
Abstract
An arrangements and methods for cooling a plasma-based radiation source having a revolving element which is to be cooled, particularly for application in EUV radiation sources, is disclosed. The revolving element is immersed in the metal coolant in a first vessel of a primary cooling circuit, and a secondary cooling circuit with a cooling liquid evaporating at the desired operating temperature of the metal coolant has a control unit for controlling at least one atomizing arrangement in a differentiated manner and for selectively controlling a heater in case the determined temperature falls below a minimum operating temperature of the metal coolant. The at least one atomizing arrangement in a cooling section selectively sprays individual wall regions of the first vessel with the cooling liquid depending on the determined temperature of the metal coolant.