The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2015
Filed:
Sep. 10, 2014
Kabushiki Kaisha Toshiba, Minato-ku, Tokyo, JP;
Hirotaka Tsuda, Tokyo, JP;
Masanori Takahashi, Kanagawa, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
In one embodiment, a topography simulation apparatus includes a division module configured to divide topography of a substance of a semiconductor device into first to n-th layers, where n is an integer of two or more. The apparatus further includes a flux calculation module configured to calculate, for each of the first to n-th layers, a flux of particles which reach a surface of the substance in each layer. The apparatus further includes a topography calculation module configured to calculate, for each of the first to n-th layers, an amount of change of the topography of the substance in each layer based on the flux.