The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2015
Filed:
Oct. 22, 2012
Applicant:
Fujifilm Electronic Materials U.s.a., Inc., North Kingstown, RI (US);
Inventors:
Assignee:
Fujifilm Electronic Materials U.S.A., Inc., N. Kingstown, RI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/14 (2006.01); H01L 21/02 (2006.01); C23F 1/44 (2006.01); H01L 21/321 (2006.01); H01L 21/3213 (2006.01); C23C 22/48 (2006.01); C23F 1/16 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
C23F 1/44 (2013.01); C23C 22/48 (2013.01); C23F 1/16 (2013.01); H01L 21/02 (2013.01); H01L 21/321 (2013.01); H01L 21/32134 (2013.01); H01L 21/28518 (2013.01);
Abstract
This disclosure relates to a passivation composition containing at least one sulfonic acid, at least one compound containing a nitrate or nitrosyl ion, and water. The passivation composition is substantially free of a halide ion.