The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 01, 2015

Filed:

Jul. 07, 2011
Applicants:

Ryuji Higashisaka, Kawasaki, JP;

Hiroshi Sone, Sagamihara, JP;

Inventors:

Ryuji Higashisaka, Kawasaki, JP;

Hiroshi Sone, Sagamihara, JP;

Assignee:

Canon Anelva Corporation, Kawasaki-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); C23C 14/56 (2006.01); C23C 14/50 (2006.01);
U.S. Cl.
CPC ...
C23C 14/568 (2013.01); C23C 14/50 (2013.01); H01L 21/67781 (2013.01);
Abstract

A substrate holder stocker device capable of reducing foot print is provided. The device includes: a movable table A which holds a plurality of substrate holders side by side in a plate thickness direction thereof and moves back and forth; a movable table B which is provided parallel to the movable table A and holds a plurality of the substrate holders side by side in a plate thickness direction thereof, and which moves back and forth; and an inter-table transfer mechanism for allowing the substrate holder which is held by one of the movable tables A and B stopped at predetermined positions to be held by the other of the movable tables A and B.


Find Patent Forward Citations

Higashisaka, Ryuji. (2015). Substrate holder stocker device, substrate processing apparatus, and substrate holder moving method using the substrate holder stocker device (U.S. Patent No. 9200362). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9200362

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…